PARTi provides a complete solution for non-destructive surface particle monitoring of consumables, parts and cleanroom apparel.
Non-Destructive Particle Monitoring
Features
- Non destructive test of particle level on various materials and parts
- Displays particle particles from 100nm to 25µm
- Monitors the particle count evolution as a function of time
- Cleanliness of parts and materials
- Only clean air & electricity required for operation
- Electro polished stainless steel chamber
Monitor Surface Particles
- Silicon wafers
- Disks holders
- Carriers
- Plastic cassettes, trays and other parts
- Cleanroom garments
- Cleanroom Consumables
Dimensions
- Chamber: 420mm x 420mm x 420mm (Opening 280mm x 240mm)
- Overall: 1,550mm (h) x 1,300mm (w) x 500mm (d)